You need to change your version to 33.0 or 34.0 in package.xml. <version>34.0</version> If not you can add <processMetadataValues> section to your process builder meta data file. Instead of <members>*</members>, provode the excact name of your process and active version number. <members>My-process-10</members>. Where "My-process" is the name of your process and "-10" is the active version. Once you deploy processes to target org, need to activate them manually.